For Process Gases

• The only metal membrane filter in the world to use stainless steel short fibers.
• Achieves low pressure loss and high particle exclusion.
• Suited to flow less than 100 SLM, useable for various process gases.

For Bulk Gases

• Through pleating the filter media’s shape, low pressure loss is achieved even with high flow volume.
• Since it’s all metal, high temperature baking is possible.
• Capable of dealing with flow up to 3000 Nm³/h.

For Component Protection

• Component protection filters for MFC, valves, regulators, and more.
• Depending on application, it’s possible to choose between a low pressure type and a high pressure type.
• Can be installed into existing pipes.

For IGS Panels

• Filters for integrated gas panels, compatible with 1.125W-Seal, 1.125C-Seal, 1.5W-Seal.
• Miniaturized through use of pleated-type media.
• Through use of mechanical seals, the media part’s composition requires no welding.

For Diffusers

• High speed venting is possible through use of pleated-type media.
• Contributes to product yield rate via preventing the rise of particles.
• Design based on various chambers space is possible.